P

Inventor

TASHIRO YUKIHITO

JP11 patents
⚠️ This page may combine multiple inventors who share the name “TASHIRO YUKIHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULVAC INC

7 patents
US10763153B2Sep 1, 2020

Holding apparatus

ULVAC INC4 citations66
US11891685B2Feb 6, 2024

Vacuum processing apparatus

ULVAC INC1 citations61
US10844474B2Nov 24, 2020

Cathode unit for sputtering apparatus

ULVAC INC1 citations61
US10934616B2Mar 2, 2021

Cathode device and sputtering apparatus

ULVAC INC0 citations60
US11056323B2Jul 6, 2021

Sputtering apparatus and method of forming film

ULVAC INC0 citations50
US11549173B2Jan 10, 2023

Sputtering apparatus

ULVAC INC0 citations49
US9561586B2Feb 7, 2017

Articulated robot, and conveying device

ULVAC INC0 citations39

IZA CORP

1 patent
US9355878B2May 31, 2016

Substrate processing apparatus

IZA CORP3 citations65

CANON ANELVA CORPOREATION

1 patent
US9346171B2May 24, 2016

Substrate transport apparatus, and system and method for manufacturing electronic device

CANON ANELVA CORPOREATION6 citations65

TASHIRO YUKIHITO

1 patent
US9245785B2Jan 26, 2016

Substrate processing apparatus

TASHIRO YUKIHITO0 citations31

WATANABE KAZUHITO

1 patent
US8912697B2Dec 16, 2014

Vacuum actuator including a stator forming a part of a vacuum partition wall

WATANABE KAZUHITO0 citations30