Inventor

KOBINATA DAISUKE

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KOBINATA DAISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON ANELVA CORPOREATION

1 patent

US9346171B2May 24, 2016

Substrate transport apparatus, and system and method for manufacturing electronic device

CANON ANELVA CORPOREATION6 citations65

CANON ANELVA CORP

1 patent

US10141208B2Nov 27, 2018

Vacuum processing apparatus

CANON ANELVA CORP0 citations34

WATANABE KAZUHITO

1 patent

US8912697B2Dec 16, 2014

Vacuum actuator including a stator forming a part of a vacuum partition wall

WATANABE KAZUHITO0 citations30