Inventor
MANO HIDEO
JP3 patents
⚠️ This page may combine multiple inventors who share the name “MANO HIDEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON ANELVA CORP
2 patentsUS9316555B2Apr 19, 2016
Cold cathode ionization vacuum gauge and inner wall protection member
CANON ANELVA CORP8 citations76
US8384391B2Feb 26, 2013
Cold cathode ionization vacuum gauge, vacuum processing apparatus having the same, discharge starting auxiliary electrode used for the same, and method of measuring pressure using the same
CANON ANELVA CORP6 citations68