Inventor
Yang hui-chun
TW12 patents
⚠️ This page may combine multiple inventors who share the name “Yang hui-chun”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS9812390B2Nov 7, 2017
Semiconductor devices including conductive features with capping layers and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10134632B2Nov 20, 2018
Low-K dielectric layer and porogen
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9564383B2Feb 7, 2017
Low-K dielectric layer and porogen
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9093265B2Jul 28, 2015
High UV curing efficiency for low-k dielectrics
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
TAIWAN SEMICONDUCTOR MFG
3 patentsUS9177918B2Nov 3, 2015
Apparatus and methods for low k dielectric layers
TAIWAN SEMICONDUCTOR MFG2 citations62
US8877083B2Nov 4, 2014
Surface treatment in the formation of interconnect structure
TAIWAN SEMICONDUCTOR MFG0 citations52
US9269614B2Feb 23, 2016
Method of forming semiconductor device using remote plasma treatment
TAIWAN SEMICONDUCTOR MFG1 citations51