Inventor
SCHÜLER BERNHARD
DE5 patents
Patents
5 patentsUS10345250B2Jul 9, 2019
Method of inspecting a sample with a charged particle beam device, and charged particle beam device
APPLIED MATERIALS INC2 citations66
US12562336B2Feb 24, 2026
Method of imaging a sample with a charged particle beam device, method of calibrating a charged particle beam device, and charged particle beam device
APPLIED MATERIALS INC0 citations57
US11610755B2Mar 21, 2023
Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample
APPLIED MATERIALS INC0 citations55
US11195691B2Dec 7, 2021
Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample
APPLIED MATERIALS INC0 citations55
US11687008B2Jun 27, 2023
Method for automated critical dimension measurement on a substrate for display manufacturing, method of inspecting a large area substrate for display manufacturing, apparatus for inspecting a large area substrate for display manufacturing and method of operating thereof
APPLIED MATERIALS INC0 citations40