Inventor

CAVENEY ROBERT T

US76 patents

⚠️ This page may combine multiple inventors who share the name “CAVENEY ROBERT T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BROOKS AUTOMATION INC

40 patents

US7988398B2Aug 2, 2011

Linear substrate transport apparatus

BROOKS AUTOMATION INC141 citations99

US7959395B2Jun 14, 2011

Substrate processing apparatus

BROOKS AUTOMATION INC92 citations98

US7575406B2Aug 18, 2009

Substrate processing apparatus

BROOKS AUTOMATION INC118 citations98

US7578649B2Aug 25, 2009

Dual arm substrate transport apparatus

BROOKS AUTOMATION INC68 citations97

US5894760AApr 20, 1999

Substrate transport drive system

BROOKS AUTOMATION INC62 citations96

US9862554B2Jan 9, 2018

Semiconductor wafer handling and transport

BROOKS AUTOMATION INC17 citations94

US10336539B2Jul 2, 2019

Automated cryogenic storage system

BROOKS AUTOMATION INC15 citations93

US6769861B2Aug 3, 2004

Apparatus for alignment and orientation of a wafer for processing

BROOKS AUTOMATION INC35 citations93

US5765983AJun 16, 1998

Robot handling apparatus

BROOKS AUTOMATION INC55 citations93

US9948155B2Apr 17, 2018

Sealed robot drive

BROOKS AUTOMATION INC16 citations92

US7607879B2Oct 27, 2009

Substrate processing apparatus with removable component module

BROOKS AUTOMATION INC36 citations91

US6123502ASep 26, 2000

Substrate holder having vacuum holding and gravity holding

BROOKS AUTOMATION INC24 citations89

US10600665B2Mar 24, 2020

Substrate processing apparatus

BROOKS AUTOMATION INC4 citations84

US10493620B2Dec 3, 2019

Compact direct drive spindle

BROOKS AUTOMATION INC6 citations84

US10325795B2Jun 18, 2019

Substrate processing apparatus

BROOKS AUTOMATION INC7 citations84

US10204817B2Feb 12, 2019

Substrate transport apparatus

BROOKS AUTOMATION INC5 citations84

US9852935B2Dec 26, 2017

Substrate processing apparatus

BROOKS AUTOMATION INC4 citations84

US9761478B2Sep 12, 2017

Substrate transport apparatus

BROOKS AUTOMATION INC11 citations84

US9751209B2Sep 5, 2017

Compact direct drive spindle

BROOKS AUTOMATION INC9 citations84

US9570330B2Feb 14, 2017

Substrate processing apparatus

BROOKS AUTOMATION INC6 citations84

US9230841B2Jan 5, 2016

Substrate processing apparatus

BROOKS AUTOMATION INC8 citations84

US8827617B2Sep 9, 2014

Substrate processing apparatus

BROOKS AUTOMATION INC8 citations84

US6279412B1Aug 28, 2001

Corrosion resistant exoskeleton arm linkage assembly

BROOKS AUTOMATION INC19 citations84

US5743704AApr 28, 1998

Wide wrist articulated arm transfer device

BROOKS AUTOMATION INC19 citations84

US10421607B2Sep 24, 2019

Cryogenic freezer

BROOKS AUTOMATION INC8 citations82

US10395959B2Aug 27, 2019

Substrate transport

BROOKS AUTOMATION INC6 citations82

US11276598B2Mar 15, 2022

Substrate transport apparatus

BROOKS AUTOMATION INC2 citations73

US11273558B2Mar 15, 2022

Substrate transport apparatus

BROOKS AUTOMATION INC2 citations73

US10777438B2Sep 15, 2020

Processing apparatus

BROOKS AUTOMATION INC2 citations73

US10748799B2Aug 18, 2020

Substrate transport apparatus with interchangeable motor modules

BROOKS AUTOMATION INC2 citations73

US10468936B2Nov 5, 2019

Sealed robot drive

BROOKS AUTOMATION INC3 citations73

US10406679B2Sep 10, 2019

Unequal link SCARA arm

BROOKS AUTOMATION INC3 citations73

US10239707B2Mar 26, 2019

Semiconductor wafer handling and transport

BROOKS AUTOMATION INC4 citations73

US10134621B2Nov 20, 2018

Substrate transport apparatus

BROOKS AUTOMATION INC5 citations73

US11121015B2Sep 14, 2021

Substrate transport

BROOKS AUTOMATION INC1 citations71

US10661990B2May 26, 2020

Automated cryogenic storage system

BROOKS AUTOMATION INC3 citations71

US10651067B2May 12, 2020

Method and apparatus for substrate transport apparatus position compensation

BROOKS AUTOMATION INC2 citations71

US11545380B2Jan 3, 2023

Transport apparatus with linear bearing

BROOKS AUTOMATION INC2 citations68

US11352220B2Jun 7, 2022

Semiconductor wafer handling and transport

BROOKS AUTOMATION INC0 citations63

US11302564B2Apr 12, 2022

Substrate transport apparatus

BROOKS AUTOMATION INC0 citations63

HOFMEISTER CHRISTOPHER

3 patents

US8602706B2Dec 10, 2013

Substrate processing apparatus

HOFMEISTER CHRISTOPHER25 citations92

US8651789B2Feb 18, 2014

Substrate processing apparatus

HOFMEISTER CHRISTOPHER6 citations84

US8267636B2Sep 18, 2012

Substrate transport apparatus

HOFMEISTER CHRISTOPHER9 citations84

CAVENEY ROBERT T

2 patents

US9248568B2Feb 2, 2016

Unequal link SCARA arm

CAVENEY ROBERT T30 citations93

US9656386B2May 23, 2017

Coaxial drive vacuum robot

CAVENEY ROBERT T6 citations72

BROOKS AUTOMATION US LLC

2 patents

US11658051B2May 23, 2023

Substrate transport

BROOKS AUTOMATION US LLC1 citations71

US11978651B2May 7, 2024

Substrate transport apparatus

BROOKS AUTOMATION US LLC0 citations63

KRUPYSHEV ALEXANDER G

1 patent

US9623555B2Apr 18, 2017

Dual arm robot

KRUPYSHEV ALEXANDER G15 citations92

GILCHRIST ULYSSES

1 patent

US8918203B2Dec 23, 2014

Substrate processing apparatus

GILCHRIST ULYSSES18 citations92

AZENTA US INC

1 patent

US12060223B2Aug 13, 2024

Automated cryogenic storage system

AZENTA US INC1 citations71

Showing the top 50 of 76 patents by PatentIndex Score.