Inventor

VAN DE WETERING FERDINANDUS MARTINUS JOZEF HENRICUS

NL2 patents

Patents

2 patents

US11048180B2Jun 29, 2021

Component for use in a patterning device environment

ASML NETHERLANDS BV0 citations47

US12372888B2Jul 29, 2025

Patterning device conditioning system and method

ASML NETHERLANDS BV0 citations46