Inventor
KLEIN ALEXANDER LUDWIG
NL4 patents
Patents
4 patentsUS11467486B2Oct 11, 2022
Graphene pellicle lithographic apparatus
ASML NETHERLANDS BV4 citations69
US12325911B2Jun 10, 2025
Method and apparatus for forming a patterned layer of material
ASML NETHERLANDS BV0 citations54
US12072620B2Aug 27, 2024
Method of manufacturing a membrane assembly
ASML NETHERLANDS BV0 citations48
US12339588B2Jun 24, 2025
High force low voltage piezoelectric micromirror actuator
ASML NETHERLANDS BV0 citations44