Inventor
OKUMURA TOMOHIRO
JP111 patents
⚠️ This page may combine multiple inventors who share the name “OKUMURA TOMOHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
32 patentsUS6355573B1Mar 12, 2002
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD207 citations99
US6093457AJul 25, 2000
Method for plasma processing
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD294 citations99
US6030667AFeb 29, 2000
Apparatus and method for applying RF power apparatus and method for generating plasma and apparatus and method for processing with plasma
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD194 citations99
US7513214B2Apr 7, 2009
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD139 citations97
US5888413AMar 30, 1999
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD125 citations97
US6346915B1Feb 12, 2002
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD70 citations96
US5609690AMar 11, 1997
Vacuum plasma processing apparatus and method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD80 citations96
US5558722ASep 24, 1996
Plasma processing apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD80 citations95
US5372648ADec 13, 1994
Plasma CVD system
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD97 citations94
US7407874B2Aug 5, 2008
Plasma doping method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD18 citations93
US7358511B2Apr 15, 2008
Plasma doping method and plasma doping apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD22 citations93
US7348264B2Mar 25, 2008
Plasma doping method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD20 citations93
US6297165B1Oct 2, 2001
Etching and cleaning methods
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD33 citations93
US5916820AJun 29, 1999
Thin film forming method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD19 citations93
US7192854B2Mar 20, 2007
Method of plasma doping
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD22 citations92
US6177646B1Jan 23, 2001
Method and device for plasma treatment
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD26 citations92
US5922223AJul 13, 1999
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD28 citations92
US7232591B2Jun 19, 2007
Method of using an adhesive for temperature control during plasma processing
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD26 citations91
US6808759B1Oct 26, 2004
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD26 citations91
US5693236ADec 2, 1997
Water-repellent surface structure and its fabrication method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD35 citations90
US7280202B2Oct 9, 2007
Ingredient analysis method and ingredient analysis apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD8 citations74
US7199064B2Apr 3, 2007
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations74
US7022937B2Apr 4, 2006
Plasma processing method and apparatus for performing uniform plasma processing on a linear portion of an object
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD7 citations74
US6893971B2May 17, 2005
Dry etching method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD8 citations74
US6875307B2Apr 5, 2005
Method and apparatus for plasma processing
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD8 citations74
US6517670B2Feb 11, 2003
Etching and cleaning apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD8 citations74
US7176402B2Feb 13, 2007
Method and apparatus for processing electronic parts
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD8 citations73
US5711850AJan 27, 1998
Plasma processing apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD13 citations73
US6905625B2Jun 14, 2005
Plasma processing method and apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD9 citations72
US6864640B2Mar 8, 2005
Plasma processing method and apparatus thereof
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD7 citations72
US7135089B2Nov 14, 2006
Method and apparatus for plasma processing
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD2 citations63
US6630792B2Oct 7, 2003
High frequency power source, plasma processing apparatus, inspection method for plasma processing apparatus, and plasma processing method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations63
PANASONIC CORP
10 patentsUS7759254B2Jul 20, 2010
Method for forming impurity-introduced layer, method for cleaning object to be processed apparatus for introducing impurity and method for producing device
PANASONIC CORP21 citations92
US7666770B2Feb 23, 2010
Method of controlling impurity doping and impurity doping apparatus
PANASONIC CORP24 citations92
US7601619B2Oct 13, 2009
Method and apparatus for plasma processing
PANASONIC CORP32 citations92
US9583313B2Feb 28, 2017
Plasma processing apparatus and plasma processing method
PANASONIC CORP10 citations84
US7456085B2Nov 25, 2008
Method for introducing impurities
PANASONIC CORP14 citations84
US7939388B2May 10, 2011
Plasma doping method and plasma doping apparatus
PANASONIC CORP2 citations63
US7863168B2Jan 4, 2011
Plasma doping method and plasma doping apparatus
PANASONIC CORP2 citations63
US7858155B2Dec 28, 2010
Plasma processing method and plasma processing apparatus
PANASONIC CORP4 citations63
US7686971B2Mar 30, 2010
Plasma processing apparatus and method
PANASONIC CORP2 citations63
US7582492B2Sep 1, 2009
Method of doping impurities, and electronic element using the same
PANASONIC CORP4 citations63
OKUMURA TOMOHIRO
4 patentsUS8160298B2Apr 17, 2012
Display device
OKUMURA TOMOHIRO8 citations81
US8511290B2Aug 20, 2013
EGR valve device
OKUMURA TOMOHIRO5 citations72
US8450819B2May 28, 2013
Plasma doping method and apparatus thereof
OKUMURA TOMOHIRO6 citations69
US8162710B2Apr 24, 2012
Method for producing plasma display panel with a bright display and a low operating voltage
OKUMURA TOMOHIRO2 citations63
PANASONIC IP MAN CO LTD
4 patentsUS9673062B1Jun 6, 2017
Plasma processing method
PANASONIC IP MAN CO LTD2 citations73
US9502220B2Nov 22, 2016
Plasma processing apparatus and plasma processing method
PANASONIC IP MAN CO LTD3 citations73
US10181406B2Jan 15, 2019
Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device
PANASONIC IP MAN CO LTD2 citations71
US9741538B2Aug 22, 2017
Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device
PANASONIC IP MAN CO LTD3 citations71
Showing the top 50 of 111 patents by PatentIndex Score.