Inventor
KAWAURA HIROSHI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KAWAURA HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PANASONIC CORP
4 patentsUS8802567B2Aug 12, 2014
Plasma processing method
PANASONIC CORP3 citations60
US9343269B2May 17, 2016
Plasma processing apparatus
PANASONIC CORP0 citations50
US10229814B2Mar 12, 2019
Plasma processing apparatus
PANASONIC CORP0 citations49
US10147585B2Dec 4, 2018
Plasma processing apparatus
PANASONIC CORP0 citations49