P

Inventor

YUKIMOTO TETSUYA

JP6 patents
⚠️ This page may combine multiple inventors who share the name “YUKIMOTO TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PANASONIC CORP

3 patents
US8802567B2Aug 12, 2014

Plasma processing method

PANASONIC CORP3 citations60
US10229814B2Mar 12, 2019

Plasma processing apparatus

PANASONIC CORP0 citations49
US10147585B2Dec 4, 2018

Plasma processing apparatus

PANASONIC CORP0 citations49

CV RES CORP

1 patent
US6916747B2Jul 12, 2005

Method of manufacturing amorphous metal oxide film and methods of manufacturing capacitance element having amorphous metal oxide film and semiconductor device

CV RES CORP3 citations55

OKUMURA TOMOHIRO

1 patent
US8624340B2Jan 7, 2014

Plasma processing apparatus and method thereof

OKUMURA TOMOHIRO1 citations50

SONY CORP

1 patent
US7666793B2Feb 23, 2010

Method of manufacturing amorphous metal oxide film and methods of manufacturing capacitance element having amorphous metal oxide film and semiconductor device

SONY CORP1 citations50