P

Inventor

VYERS EMMANUEL

SG9 patents
⚠️ This page may combine multiple inventors who share the name “VYERS EMMANUEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MYKROLIS CORP

3 patents
US6389364B1May 14, 2002

System and method for a digital mass flow controller

MYKROLIS CORP95 citations96
US6445980B1Sep 3, 2002

System and method for a variable gain proportional-integral (PI) controller

MYKROLIS CORP67 citations94
US6714878B2Mar 30, 2004

System and method for a digital mass flow controller

MYKROLIS CORP19 citations91

NOR CAL PROD INC

2 patents
US6612331B2Sep 2, 2003

Pressure controller and method

NOR CAL PROD INC22 citations89
US6814096B2Nov 9, 2004

Pressure controller and method

NOR CAL PROD INC13 citations80

INOVITA PTE LTD

2 patents
US11776723B2Oct 3, 2023

Drive unit for gate valve

INOVITA PTE LTD0 citations41
US10606288B2Mar 31, 2020

Pressure control method for process chamber and pressure control device for process chamber

INOVITA PTE LTD0 citations31

PROGRESSIO LLC

1 patent
US9880569B2Jan 30, 2018

Pressure control method for process chamber and pressure control device for process chamber

PROGRESSIO LLC3 citations62

SUMITOMO HEAVY INDUSTRIES

1 patent
US11629796B2Apr 18, 2023

Vacuum valve and actuator used in vacuum valve

SUMITOMO HEAVY INDUSTRIES0 citations61