Inventor
NAKAGAWASAI MANABU
JP11 patents
Patents
11 patentsUS11532784B2Dec 20, 2022
Substrate processing apparatus and method
TOKYO ELECTRON LTD3 citations69
US11867458B2Jan 9, 2024
Temperature sensor, temperature measuring device, and temperature measuring method
TOKYO ELECTRON LTD0 citations59
US11608555B2Mar 21, 2023
Sputtering apparatus
TOKYO ELECTRON LTD0 citations59
US11605547B2Mar 14, 2023
Temperature measuring mechanism, temperature measuring method, and stage device
TOKYO ELECTRON LTD0 citations59
US11417504B2Aug 16, 2022
Stage device and processing apparatus
TOKYO ELECTRON LTD1 citations59
US12167542B2Dec 10, 2024
Method for manufacturing substrate with sensor
TOKYO ELECTRON LTD0 citations57
US12211706B2Jan 28, 2025
Substrate processing device and method of manufacturing substrate processing device
TOKYO ELECTRON LTD0 citations50
US11293092B2Apr 5, 2022
Stage device and processing apparatus
TOKYO ELECTRON LTD0 citations50
US12392026B2Aug 19, 2025
Method and device for substrate processing
TOKYO ELECTRON LTD0 citations47
US12362155B2Jul 15, 2025
Substrate processing apparatus, temperature control method of substrate processing apparatus, and program of control device for controlling substrate processing apparatus
TOKYO ELECTRON LTD0 citations45
US10847399B2Nov 24, 2020
Movable structure and film forming apparatus
TOKYO ELECTRON LTD0 citations38