Inventor
ONO KAZUNAGA
JP4 patents
Patents
4 patentsUS12018928B2Jun 25, 2024
Film thickness measurement method, film thickness measurement device, and film formation system
TOKYO ELECTRON LTD0 citations59
US11939665B2Mar 26, 2024
Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method
TOKYO ELECTRON LTD1 citations59
US11404255B2Aug 2, 2022
Sputtering method and sputtering apparatus
TOKYO ELECTRON LTD0 citations52
US12180580B2Dec 31, 2024
Film forming position misalignment correction method and film forming system
TOKYO ELECTRON LTD0 citations49