Inventor
NAKAMURA KANTO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “NAKAMURA KANTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS10309005B2Jun 4, 2019
Deposition device and deposition method
TOKYO ELECTRON LTD3 citations72
US9790590B2Oct 17, 2017
Vacuum-processing apparatus, vacuum-processing method, and storage medium
TOKYO ELECTRON LTD6 citations71
US9551060B2Jan 24, 2017
Film forming apparatus and film forming method
TOKYO ELECTRON LTD6 citations70
US12543505B2Feb 3, 2026
Method of manufacturing magnetoresistive element, oxidation processing apparatus, and substrate processing system
TOKYO ELECTRON LTD0 citations60
US12018928B2Jun 25, 2024
Film thickness measurement method, film thickness measurement device, and film formation system
TOKYO ELECTRON LTD0 citations59
US11901166B2Feb 13, 2024
Magnetron sputtering apparatus and magnetron sputtering method
TOKYO ELECTRON LTD0 citations51
US10566525B2Feb 18, 2020
Method for manufacturing magnetoresistive element
TOKYO ELECTRON LTD0 citations51
US11894222B2Feb 6, 2024
Film forming apparatus and film forming method
TOKYO ELECTRON LTD0 citations50
US12180580B2Dec 31, 2024
Film forming position misalignment correction method and film forming system
TOKYO ELECTRON LTD0 citations49
US12077848B2Sep 3, 2024
Vacuum processing apparatus
TOKYO ELECTRON LTD0 citations49