Inventor

BUFANO MICHAEL L

US14 patents

⚠️ This page may combine multiple inventors who share the name “BUFANO MICHAEL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BROOKS AUTOMATION INC

6 patents

US9224628B2Dec 29, 2015

BUFANO MICHAEL L

3 patents

US8272827B2Sep 25, 2012

Reduced capacity carrier, transport, load port, buffer system

BUFANO MICHAEL L26 citations91

US8328495B2Dec 11, 2012

Reduced capacity carrier, transport, load port, buffer system

BUFANO MICHAEL L13 citations83

US8267634B2Sep 18, 2012

Reduced capacity carrier, transport, load port, buffer system

BUFANO MICHAEL L19 citations83

WALTHER STEVEN R

2 patents

US8339024B2Dec 25, 2012

Methods and apparatuses for reducing heat on an emitter exit window

WALTHER STEVEN R3 citations60

US8766523B2Jul 1, 2014

Electron beam exit window in electron beam emitter and method for forming the same

WALTHER STEVEN R0 citations49

GILCHRIST ULYSSES

1 patent

US8888433B2Nov 18, 2014

Reduced capacity carrier and method of use

GILCHRIST ULYSSES6 citations83

FRIEDMAN GERALD M

1 patent

US8678734B2Mar 25, 2014

Elevator-based tool loading and buffering system

FRIEDMAN GERALD M1 citations56

WALTHER STEVEN RAYMOND

1 patent

US8338796B2Dec 25, 2012

Electron beam emitter with slotted gun

WALTHER STEVEN RAYMOND0 citations31