Inventor
FOSNIGHT WILLIAM
US35 patents
⚠️ This page may combine multiple inventors who share the name “FOSNIGHT WILLIAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
17 patentsUS7925378B2Apr 12, 2011
Process apparatus with on-the-fly workpiece centering
BROOKS AUTOMATION INC545 citations96
US9224628B2Dec 29, 2015
Reduced capacity carrier, transport, load port, buffer system
BROOKS AUTOMATION INC16 citations92
US7806643B2Oct 5, 2010
Elevator-based tool loading and buffering system
BROOKS AUTOMATION INC27 citations92
US7607879B2Oct 27, 2009
Substrate processing apparatus with removable component module
BROOKS AUTOMATION INC36 citations91
US7798758B2Sep 21, 2010
Reduced capacity carrier, transport, load port, buffer system
BROOKS AUTOMATION INC16 citations84
US8662812B2Mar 4, 2014
Load lock fast pump vent
BROOKS AUTOMATION INC13 citations82
US7699573B2Apr 20, 2010
Reticle manipulating device
BROOKS AUTOMATION INC11 citations79
US10679882B2Jun 9, 2020
Reduced capacity carrier, transport, load port, buffer system
BROOKS AUTOMATION INC3 citations73
US9368382B2Jun 14, 2016
Elevator-based tool loading and buffering system
BROOKS AUTOMATION INC3 citations73
US9978623B2May 22, 2018
Side opening unified pod
BROOKS AUTOMATION INC2 citations72
US10854478B2Dec 1, 2020
Load lock fast pump vent
BROOKS AUTOMATION INC2 citations71
US11201070B2Dec 14, 2021
Side opening unified pod
BROOKS AUTOMATION INC0 citations62
US11610787B2Mar 21, 2023
Load lock fast pump vent
BROOKS AUTOMATION INC0 citations61
US9478446B2Oct 25, 2016
Load lock chamber
BROOKS AUTOMATION INC2 citations61
US10541157B2Jan 21, 2020
Load lock fast pump vent
BROOKS AUTOMATION INC0 citations49
US7762755B2Jul 27, 2010
Equipment storage for substrate processing apparatus
BROOKS AUTOMATION INC0 citations49
US9881825B2Jan 30, 2018
Reduced capacity carrier and method of use
BROOKS AUTOMATION INC0 citations48
BUFANO MICHAEL L
3 patentsUS8272827B2Sep 25, 2012
Reduced capacity carrier, transport, load port, buffer system
BUFANO MICHAEL L26 citations91
US8328495B2Dec 11, 2012
Reduced capacity carrier, transport, load port, buffer system
BUFANO MICHAEL L13 citations83
US8267634B2Sep 18, 2012
Reduced capacity carrier, transport, load port, buffer system
BUFANO MICHAEL L19 citations83
GLOBALFOUNDRIES INC
3 patentsUS9564350B1Feb 7, 2017
Method and apparatus for storing and transporting semiconductor wafers in a vacuum pod
GLOBALFOUNDRIES INC2 citations72
US9411332B2Aug 9, 2016
Automated mechanical handling systems for integrated circuit fabrication, system computers programmed for use therein, and methods of handling a wafer carrier having an inlet port and an outlet port
GLOBALFOUNDRIES INC5 citations65
US9632499B2Apr 25, 2017
Work-in-progress substrate processing methods and systems for use in the fabrication of integrated circuits
GLOBALFOUNDRIES INC0 citations32