P

Inventor

BOX WILHELMUS JOSEPHUS

BE31 patents
⚠️ This page may combine multiple inventors who share the name “BOX WILHELMUS JOSEPHUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

23 patents
US7247866B2Jul 24, 2007

Contamination barrier with expandable lamellas

ASML NETHERLANDS BV16 citations92
US7151588B2Dec 19, 2006

Lithographic apparatus and a method of compensating for thermal deformation in a lithographic apparatus

ASML NETHERLANDS BV18 citations84
US7106416B2Sep 12, 2006

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV14 citations84
US7362415B2Apr 22, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV15 citations80
US7545478B2Jun 9, 2009

Lithographic apparatus, thermal conditioning system, and method for manufacturing a device

ASML NETHERLANDS BV12 citations79
US6747730B2Jun 8, 2004

Lithographic apparatus, device manufacturing method, and method of manufacturing an optical element

ASML NETHERLANDS BV10 citations74
US7737425B2Jun 15, 2010

Contamination barrier with expandable lamellas

ASML NETHERLANDS BV5 citations73
US7116399B2Oct 3, 2006

Lithographic apparatus, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV8 citations73
US6977713B2Dec 20, 2005

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV9 citations72
US7542127B2Jun 2, 2009

Lithographic apparatus and method for manufacturing a device

ASML NETHERLANDS BV7 citations71
US7375794B2May 20, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV6 citations63
US7397538B2Jul 8, 2008

Radiation system and lithographic apparatus

ASML NETHERLANDS BV3 citations61
US7522258B2Apr 21, 2009

Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination

ASML NETHERLANDS BV3 citations60
US7471373B2Dec 30, 2008

Lithographic apparatus with patterning device position determination

ASML NETHERLANDS BV3 citations60
US7274431B2Sep 25, 2007

Lithographic projection apparatus and device manufacturing method

ASML NETHERLANDS BV4 citations60
US7130019B2Oct 31, 2006

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV3 citations60
US7470916B2Dec 30, 2008

Lithographic apparatus, device manufacturing method and radiation collector

ASML NETHERLANDS BV2 citations57
US9285689B2Mar 15, 2016

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations52
US7630060B2Dec 8, 2009

Device manufacturing method, lithographic apparatus and device manufactured thereby

ASML NETHERLANDS BV1 citations52
US7391502B2Jun 24, 2008

Lithographic apparatus, device manufacturing method, and method of manufacturing a component

ASML NETHERLANDS BV0 citations52
US7489388B2Feb 10, 2009

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations51
US7061579B2Jun 13, 2006

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations48
US7423721B2Sep 9, 2008

Lithographic apparatus

ASML NETHERLANDS BV0 citations36

STEIJAERT PETER PAUL

3 patents

KONINKLIJKE PHILIPS NV

2 patents

BAKKER LEVINUS PIETER

1 patent

ASML NETHERLAND BV

1 patent

BOX WILHELMUS JOSEPHUS

1 patent