Inventor
BOX WILHELMUS JOSEPHUS
BE31 patents
⚠️ This page may combine multiple inventors who share the name “BOX WILHELMUS JOSEPHUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
23 patentsUS7247866B2Jul 24, 2007
Contamination barrier with expandable lamellas
ASML NETHERLANDS BV16 citations92
US7151588B2Dec 19, 2006
Lithographic apparatus and a method of compensating for thermal deformation in a lithographic apparatus
ASML NETHERLANDS BV18 citations84
US7106416B2Sep 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations84
US7362415B2Apr 22, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations80
US7545478B2Jun 9, 2009
Lithographic apparatus, thermal conditioning system, and method for manufacturing a device
ASML NETHERLANDS BV12 citations79
US6747730B2Jun 8, 2004
Lithographic apparatus, device manufacturing method, and method of manufacturing an optical element
ASML NETHERLANDS BV10 citations74
US7737425B2Jun 15, 2010
Contamination barrier with expandable lamellas
ASML NETHERLANDS BV5 citations73
US7116399B2Oct 3, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV8 citations73
US6977713B2Dec 20, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations72
US7542127B2Jun 2, 2009
Lithographic apparatus and method for manufacturing a device
ASML NETHERLANDS BV7 citations71
US7375794B2May 20, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations63
US7397538B2Jul 8, 2008
Radiation system and lithographic apparatus
ASML NETHERLANDS BV3 citations61
US7522258B2Apr 21, 2009
Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination
ASML NETHERLANDS BV3 citations60
US7471373B2Dec 30, 2008
Lithographic apparatus with patterning device position determination
ASML NETHERLANDS BV3 citations60
US7274431B2Sep 25, 2007
Lithographic projection apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations60
US7130019B2Oct 31, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations60
US7470916B2Dec 30, 2008
Lithographic apparatus, device manufacturing method and radiation collector
ASML NETHERLANDS BV2 citations57
US9285689B2Mar 15, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US7630060B2Dec 8, 2009
Device manufacturing method, lithographic apparatus and device manufactured thereby
ASML NETHERLANDS BV1 citations52
US7391502B2Jun 24, 2008
Lithographic apparatus, device manufacturing method, and method of manufacturing a component
ASML NETHERLANDS BV0 citations52
US7489388B2Feb 10, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations51
US7061579B2Jun 13, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations48
US7423721B2Sep 9, 2008
Lithographic apparatus
ASML NETHERLANDS BV0 citations36
STEIJAERT PETER PAUL
3 patentsUS8687166B2Apr 1, 2014
Lithographic apparatus having an encoder position sensor system
STEIJAERT PETER PAUL3 citations59
US8836913B2Sep 16, 2014
Lithographic apparatus having an encoder type position sensor system
STEIJAERT PETER PAUL0 citations46
US8760615B2Jun 24, 2014
Lithographic apparatus having encoder type position sensor system
STEIJAERT PETER PAUL0 citations46
KONINKLIJKE PHILIPS NV
2 patentsUS11583250B2Feb 21, 2023
Ultrasound probe positioning system and method of hands-free controlling the pressure applied by an ultrasound probe to an external object
KONINKLIJKE PHILIPS NV0 citations44
US10701512B2Jun 30, 2020
Geo-fencing based on multiple signals and configuration
KONINKLIJKE PHILIPS NV0 citations39