Inventor
BEERENS RUUD ANTONIUS CATHARINA MARIA
NL23 patents
⚠️ This page may combine multiple inventors who share the name “BEERENS RUUD ANTONIUS CATHARINA MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
11 patentsUS7999912B2Aug 16, 2011
Lithographic apparatus and sensor calibration method
ASML NETHERLANDS BV7 citations81
US9983482B2May 29, 2018
Radiation collector, radiation source and lithographic apparatus
ASML NETHERLANDS BV2 citations70
US9494869B2Nov 15, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations50
US9785060B2Oct 10, 2017
Stage system and lithographic apparatus comprising such stage system
ASML NETHERLANDS BV0 citations49
US9360774B2Jun 7, 2016
Lithographic apparatus with a deformation sensor
ASML NETHERLANDS BV1 citations48
US12242204B2Mar 4, 2025
Substrate support, lithographic apparatus, method for manipulating charge distribution and method for preparing a substrate
ASML NETHERLANDS BV0 citations47
US9383659B2Jul 5, 2016
Positioning system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations46
US9410796B2Aug 9, 2016
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations41
US9575416B2Feb 21, 2017
Lithographic apparatus, device manufacturing method and displacement measurement system
ASML NETHERLANDS BV0 citations40
US12007693B2Jun 11, 2024
Laser focussing module
ASML NETHERLANDS BV0 citations38
US10061213B2Aug 28, 2018
Sensor, object positioning system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations36
BEERENS RUUD ANTONIUS CATHARINA MARIA
5 patentsUS8976335B2Mar 10, 2015
Lithographic apparatus and removable member
BEERENS RUUD ANTONIUS CATHARINA MARIA9 citations82
US9141003B2Sep 22, 2015
Lithographic apparatus and device manufacturing method
BEERENS RUUD ANTONIUS CATHARINA MARIA1 citations50
US8736815B2May 27, 2014
Position sensor and lithographic apparatus
BEERENS RUUD ANTONIUS CATHARINA MARIA1 citations50
US9182683B2Nov 10, 2015
Lithographic apparatus and lithographic projection method
BEERENS RUUD ANTONIUS CATHARINA MARIA0 citations39
US8334983B2Dec 18, 2012
Lithographic apparatus and device manufacturing method
BEERENS RUUD ANTONIUS CATHARINA MARIA0 citations39
STEIJAERT PETER PAUL
3 patentsUS8687166B2Apr 1, 2014
Lithographic apparatus having an encoder position sensor system
STEIJAERT PETER PAUL3 citations59
US8836913B2Sep 16, 2014
Lithographic apparatus having an encoder type position sensor system
STEIJAERT PETER PAUL0 citations46
US8760615B2Jun 24, 2014
Lithographic apparatus having encoder type position sensor system
STEIJAERT PETER PAUL0 citations46