Inventor
KANOMATA ICHIRO
9 patents
Patents
9 patentsUS4330384AMay 18, 1982
Process for plasma etching
HITACHI LTD52 citations96
US4462863AJul 31, 1984
Microwave plasma etching
HITACHI LTD59 citations95
US4409520AOct 11, 1983
Microwave discharge ion source
HITACHI LTD29 citations92
US4298419ANov 3, 1981
Dry etching apparatus
HITACHI LTD39 citations92
US4101411AJul 18, 1978
Plasma etching apparatus
HITACHI LTD33 citations92
US4393333AJul 12, 1983
Microwave plasma ion source
HITACHI LTD38 citations90
US4430138AFeb 7, 1984
Microwave plasma etching apparatus having fan-shaped discharge
HITACHI LTD21 citations82
US4058748ANov 15, 1977
Microwave discharge ion source
HITACHI LTD23 citations81
US4316090AFeb 16, 1982
Microwave plasma ion source
HITACHI LTD17 citations73