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Inventor
OLSEN AAGE
US
3 patents
⚠️ This page may combine multiple inventors who share the name “OLSEN AAGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
2 patents
US6021152A
Feb 1, 2000
Reflective surface for CVD reactor walls
ASM INC
59 citations
94
US6319556B1
Nov 20, 2001
Reflective surface for CVD reactor walls
ASM INC
26 citations
90
EPSILON LP
1 patent
US4874464A
Oct 17, 1989
Process for epitaxial deposition of silicon
EPSILON LP
36 citations
90