Inventor
KO CHUN-HUNG
TW9 patents
⚠️ This page may combine multiple inventors who share the name “KO CHUN-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IND TECH RES INST
5 patentsUS7532317B2May 12, 2009
Scatterometry method with characteristic signatures matching
IND TECH RES INST16 citations83
US6995902B2Feb 7, 2006
Microscopic imaging apparatus with flat-top distribution of light
IND TECH RES INST7 citations67
US7800824B2Sep 21, 2010
Method for designing gratings
IND TECH RES INST2 citations61
US7355713B2Apr 8, 2008
Method for inspecting a grating biochip
IND TECH RES INST0 citations51
US7610170B2Oct 27, 2009
Method for enhancing the measurement capability of multi-parameter inspection systems
IND TECH RES INST1 citations50