Inventor

TANIYAMA KENICHI

JP3 patents

Patents

3 patents

US5817178AOct 6, 1998

Apparatus for baking photoresist applied on substrate

TOSHIBA KK57 citations93

US6051371AApr 18, 2000

Method for baking photoresist applied on substrate

TOSHIBA KK25 citations89

US6033474AMar 7, 2000

Apparatus for baking photoresist applied on substrate

TOSHIBA KK14 citations79