Inventor
GOTO YOSHINOBU
JP45 patents
⚠️ This page may combine multiple inventors who share the name “GOTO YOSHINOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
23 patentsUS7247819B2Jul 24, 2007
Substrate heating apparatus
NGK INSULATORS LTD26 citations92
US7189946B2Mar 13, 2007
Substrate heating device
NGK INSULATORS LTD30 citations92
US7044399B2May 16, 2006
Heating systems
NGK INSULATORS LTD22 citations92
US6875960B2Apr 5, 2005
Heating system
NGK INSULATORS LTD28 citations92
US5941302AAug 24, 1999
Ceramic shell-and-tube type heat exchanger and method for manufacturing the same
NGK INSULATORS LTD25 citations92
US7525071B2Apr 28, 2009
Power-supplying member and heating apparatus using the same
NGK INSULATORS LTD12 citations84
US7274006B2Sep 25, 2007
Heater
NGK INSULATORS LTD16 citations84
US6997993B2Feb 14, 2006
Susceptor supporting construction
NGK INSULATORS LTD12 citations84
US7126093B2Oct 24, 2006
Heating systems
NGK INSULATORS LTD7 citations74
US7115839B2Oct 3, 2006
Heaters
NGK INSULATORS LTD9 citations74
US7679034B2Mar 16, 2010
Power-supplying member and heating apparatus using the same
NGK INSULATORS LTD5 citations63
US7053339B2May 30, 2006
Ceramic heater
NGK INSULATORS LTD5 citations63
US7022947B2Apr 4, 2006
Systems for supporting ceramic susceptors
NGK INSULATORS LTD2 citations63
US6979369B2Dec 27, 2005
Fixing structures and supporting structures of ceramic susceptors, and supporting members thereof
NGK INSULATORS LTD5 citations63
US7544916B2Jun 9, 2009
Heating device
NGK INSULATORS LTD4 citations62
US7173220B2Feb 6, 2007
Heating device
NGK INSULATORS LTD2 citations62
US7401399B2Jul 22, 2008
Method of manufacturing a substrate heating device
NGK INSULATORS LTD3 citations61
US12506028B2Dec 23, 2025
Member for semiconductor manufacturing apparatus
NGK INSULATORS LTD0 citations60
US7332694B2Feb 19, 2008
Heating resistances and heaters
NGK INSULATORS LTD0 citations52
US7220320B2May 22, 2007
Systems for producing semiconductors and members therefor
NGK INSULATORS LTD0 citations52
US7157666B2Jan 2, 2007
Systems for producing semiconductors and members therefor
NGK INSULATORS LTD1 citations52
US7011712B2Mar 14, 2006
Fixing structures and supporting structures of ceramic susceptors, and supporting members thereof
NGK INSULATORS LTD0 citations42
US7432474B2Oct 7, 2008
Heating device
NGK INSULATORS LTD0 citations41
SEIKO EPSON CORP
13 patentsUSD782553SMar 28, 2017
Industrial robot
SEIKO EPSON CORP33 citations93
US8684432B2Apr 1, 2014
Robot hand, robot, and holding mechanism
SEIKO EPSON CORP13 citations83
US11161257B2Nov 2, 2021
Robot
SEIKO EPSON CORP6 citations73
US10391643B2Aug 27, 2019
Robot
SEIKO EPSON CORP2 citations73
US10046465B2Aug 14, 2018
Attaching and detaching device and robot
SEIKO EPSON CORP4 citations73
US10940595B2Mar 9, 2021
Robot
SEIKO EPSON CORP5 citations72
US9597794B2Mar 21, 2017
Robot
SEIKO EPSON CORP5 citations72
US11045961B2Jun 29, 2021
Robot and robot system
SEIKO EPSON CORP1 citations61
US11745339B2Sep 5, 2023
Horizontal articulated robot
SEIKO EPSON CORP0 citations52
US9889555B2Feb 13, 2018
Robot System
SEIKO EPSON CORP0 citations51
US8857876B1Oct 14, 2014
Robot hand, robot, and holding mechanism
SEIKO EPSON CORP0 citations51
US11077549B2Aug 3, 2021
Robot and robot system
SEIKO EPSON CORP0 citations50
US10737399B2Aug 11, 2020
Robot
SEIKO EPSON CORP0 citations41
GOTO YOSHINOBU
7 patentsUS8790007B2Jul 29, 2014
Semiconductor manufacturing apparatus member
GOTO YOSHINOBU9 citations83
US8294069B2Oct 23, 2012
Heating device for heating a wafer
GOTO YOSHINOBU7 citations83
US8897918B2Nov 25, 2014
Robot hand and robot
GOTO YOSHINOBU4 citations72
US8168926B2May 1, 2012
Heating device
GOTO YOSHINOBU6 citations72
US8336891B2Dec 25, 2012
Electrostatic chuck
GOTO YOSHINOBU3 citations62
US8865291B2Oct 21, 2014
Plasma-resistant member
GOTO YOSHINOBU0 citations51
US8748782B2Jun 10, 2014
Ceramic heater
GOTO YOSHINOBU0 citations51