Inventor

MARIANEK FRANK

DE2 patents

⚠️ This page may combine multiple inventors who share the name “MARIANEK FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCHUSTER KARL-HEINZ

1 patent

US8068279B2Nov 29, 2011

Optical system of an illumination device of a projection exposure apparatus

SCHUSTER KARL-HEINZ10 citations78

ZEISS STIFTUNG

1 patent

US6441975B1Aug 27, 2002

Device for the low-deformation support of an optical element and method for the low-deformation support of the optical element

ZEISS STIFTUNG8 citations69