Inventor
KUZNETSOV VLADIMIR IVANOVICH
NL14 patents
⚠️ This page may combine multiple inventors who share the name “KUZNETSOV VLADIMIR IVANOVICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INT
11 patentsUS6719499B1Apr 13, 2004
Device for positioning a wafer
ASM INT353 citations95
US6746237B2Jun 8, 2004
Method and device for heat treating substrates
ASM INT48 citations93
US6877250B2Apr 12, 2005
Apparatus, method and system for the treatment of a wafer
ASM INT21 citations92
US7048488B1May 23, 2006
Apparatus for transferring wafer and ring
ASM INT51 citations91
US6770851B2Aug 3, 2004
Method and apparatus for the treatment of substrates
ASM INT37 citations91
US6824619B1Nov 30, 2004
Method and device for rotating a wafer
ASM INT13 citations80
US6561798B2May 13, 2003
Apparatus for processing a wafer
ASM INT13 citations75
US6560896B2May 13, 2003
Apparatus, method and system for the treatment of a wafer
ASM INT9 citations73
US6551404B2Apr 22, 2003
Apparatus for treating a wafer
ASM INT9 citations73
US7351293B2Apr 1, 2008
Method and device for rotating a wafer
ASM INT7 citations70
US6964751B2Nov 15, 2005
Method and device for heat treating substrates
ASM INT10 citations70