Inventor
WARGO CHRISTOPHER
US11 patents
⚠️ This page may combine multiple inventors who share the name “WARGO CHRISTOPHER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
5 patentsUS7292945B2Nov 6, 2007
Fluid flow measuring and proportional fluid flow control device
ENTEGRIS INC12 citations91
US7447600B2Nov 4, 2008
Fluid flow measuring and proportional fluid flow control device
ENTEGRIS INC6 citations72
US9616547B2Apr 11, 2017
Chemical mechanical planarization pad conditioner
ENTEGRIS INC2 citations71
US9820561B2Nov 21, 2017
Molded rotatable base for a porous pad
ENTEGRIS INC1 citations61
US7885773B2Feb 8, 2011
Fluid flow measuring and proportional fluid flow control device
ENTEGRIS INC2 citations61
WARGO CHRISTOPHER
4 patentsUSD682497SMay 14, 2013
Substrate cleaning brush
WARGO CHRISTOPHER21 citations87
US8460475B2Jun 11, 2013
Molded rotatable base for a porous pad
WARGO CHRISTOPHER5 citations82
US8155896B2Apr 10, 2012
Fluid flow measuring and proportional fluid flow control device
WARGO CHRISTOPHER8 citations82
US8092730B2Jan 10, 2012
Molded rotatable base for a porous pad
WARGO CHRISTOPHER12 citations82