P

Inventor

SCHOENGART STEFAN

DE5 patents
⚠️ This page may combine multiple inventors who share the name “SCHOENGART STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

3 patents
US7304717B2Dec 4, 2007

Imaging device in a projection exposure facility

ZEISS CARL SMT AG12 citations91
US7486382B2Feb 3, 2009

Imaging device in a projection exposure machine

ZEISS CARL SMT AG8 citations82
US7710542B2May 4, 2010

Imaging device in a projection exposure machine

ZEISS CARL SMT AG7 citations72

ZEISS CARL SMT GMBH

1 patent
US7961294B2Jun 14, 2011

Imaging device in a projection exposure facility

ZEISS CARL SMT GMBH6 citations72

HUMMEL WOLFGANG

1 patent
US8514371B2Aug 20, 2013

Imaging device in a projection exposure facility

HUMMEL WOLFGANG0 citations46