Inventor

TROSSBACH BAERBEL

DE4 patents

⚠️ This page may combine multiple inventors who share the name “TROSSBACH BAERBEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

US7304717B2Dec 4, 2007

Imaging device in a projection exposure facility

ZEISS CARL SMT AG12 citations91

US7710542B2May 4, 2010

Imaging device in a projection exposure machine

ZEISS CARL SMT AG7 citations72

ZEISS CARL SMT GMBH

1 patent

US7961294B2Jun 14, 2011

Imaging device in a projection exposure facility

ZEISS CARL SMT GMBH6 citations72

HUMMEL WOLFGANG

1 patent

US8514371B2Aug 20, 2013

Imaging device in a projection exposure facility

HUMMEL WOLFGANG0 citations46