Inventor
RASSEL THORSTEN
DE13 patents
⚠️ This page may combine multiple inventors who share the name “RASSEL THORSTEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
5 patentsUS7961294B2Jun 14, 2011
Imaging device in a projection exposure facility
ZEISS CARL SMT GMBH6 citations72
US9341807B2May 17, 2016
Gravitation compensation for optical elements in projection exposure apparatuses
ZEISS CARL SMT GMBH3 citations71
US9298101B2Mar 29, 2016
Multi facet mirror of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations51
US9041910B2May 26, 2015
Multi facet mirror of a microlithographic projection exposure apparatus with a tilting actuator
ZEISS CARL SMT GMBH1 citations51
US9513562B2Dec 6, 2016
Projection exposure apparatus for microlithography for the production of semiconductor components
ZEISS CARL SMT GMBH0 citations50
ZEISS CARL SMT AG
4 patentsUS7304717B2Dec 4, 2007
Imaging device in a projection exposure facility
ZEISS CARL SMT AG12 citations91
US7486382B2Feb 3, 2009
Imaging device in a projection exposure machine
ZEISS CARL SMT AG8 citations82
US7710542B2May 4, 2010
Imaging device in a projection exposure machine
ZEISS CARL SMT AG7 citations72
US7548387B2Jun 16, 2009
Optical imaging device
ZEISS CARL SMT AG4 citations60