Inventor
ZOJAJI ALI
US13 patents
⚠️ This page may combine multiple inventors who share the name “ZOJAJI ALI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS8029620B2Oct 4, 2011
Methods of forming carbon-containing silicon epitaxial layers
APPLIED MATERIALS INC95 citations98
US7682940B2Mar 23, 2010
Use of Cl2 and/or HCl during silicon epitaxial film formation
APPLIED MATERIALS INC32 citations96
US7960256B2Jun 14, 2011
Use of CL2 and/or HCL during silicon epitaxial film formation
APPLIED MATERIALS INC8 citations84
US7732305B2Jun 8, 2010
Use of Cl2 and/or HCl during silicon epitaxial film formation
APPLIED MATERIALS INC10 citations84
US7732269B2Jun 8, 2010
Method of ultra-shallow junction formation using Si film alloyed with carbon
APPLIED MATERIALS INC10 citations83
US7651948B2Jan 26, 2010
Pre-cleaning of substrates in epitaxy chambers
APPLIED MATERIALS INC18 citations83
US7598178B2Oct 6, 2009
Carbon precursors for use during silicon epitaxial film formation
APPLIED MATERIALS INC16 citations80
US7195934B2Mar 27, 2007
Method and system for deposition tuning in an epitaxial film growth apparatus
APPLIED MATERIALS INC5 citations62
US7674337B2Mar 9, 2010
Gas manifolds for use during epitaxial film formation
APPLIED MATERIALS INC0 citations50