Inventor
TSUBOI ATSUSHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “TSUBOI ATSUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
3 patentsUS6528881B1Mar 4, 2003
Semiconductor device utilizing a side wall to prevent deterioration between electrode pad and barrier layer
NEC CORP57 citations94
US5726098AMar 10, 1998
Method of manufacturing semiconductor device having multilevel interconnection
NEC CORP51 citations90
US6413841B1Jul 2, 2002
MOS type semiconductor device and manufacturing method thereof
NEC CORP10 citations71