Inventor
VALCORE JR JOHN
US4 patents
⚠️ This page may combine multiple inventors who share the name “VALCORE JR JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS10832979B2Nov 10, 2020
Feedback control system for iterative etch process
LAM RES CORP3 citations65
US10432248B1Oct 1, 2019
RF metrology system for a substrate processing apparatus incorporating RF sensors with corresponding lock-in amplifiers
LAM RES CORP1 citations55
US12217940B2Feb 4, 2025
Sensor data compression in a plasma tool
LAM RES CORP0 citations46