P

Inventor

GATES STEPHEN M

US87 patents
⚠️ This page may combine multiple inventors who share the name “GATES STEPHEN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

40 patents
US7088003B2Aug 8, 2006

Structures and methods for integration of ultralow-k dielectrics with improved reliability

IBM563 citations99
US7045453B2May 16, 2006

Very low effective dielectric constant interconnect structures and methods for fabricating the same

IBM221 citations99
US6391658B1May 21, 2002

Formation of arrays of microelectronic elements

IBM257 citations99
US6162532ADec 19, 2000

Magnetic storage medium formed of nanoparticles

IBM190 citations99
US9349687B1May 24, 2016

Advanced manganese/manganese nitride cap/etch mask for air gap formation scheme in nanocopper low-K interconnect

IBM96 citations98
US9305836B1Apr 5, 2016

Air gap semiconductor structure with selective cap bilayer

IBM488 citations98
US7282458B2Oct 16, 2007

Low K and ultra low K SiCOH dielectric films and methods to form the same

IBM97 citations98
US7049247B2May 23, 2006

Method for fabricating an ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made

IBM558 citations98
US7030468B2Apr 18, 2006

Low k and ultra low k SiCOH dielectric films and methods to form the same

IBM71 citations98
US7023093B2Apr 4, 2006

Very low effective dielectric constant interconnect Structures and methods for fabricating the same

IBM112 citations98
US6911400B2Jun 28, 2005

Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same

IBM79 citations98
US6617690B1Sep 9, 2003

Interconnect structures containing stress adjustment cap layer

IBM79 citations98
US6641899B1Nov 4, 2003

Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same

IBM43 citations96
US6917108B2Jul 12, 2005

Reliable low-k interconnect structure with hybrid dielectric

IBM49 citations95
US7253105B2Aug 7, 2007

Reliable BEOL integration process with direct CMP of porous SiCOH dielectric

IBM26 citations93
US6989575B2Jan 24, 2006

Formation of arrays of microelectronic elements

IBM21 citations93
US6803660B1Oct 12, 2004

Patterning layers comprised of spin-on ceramic films

IBM19 citations93
US7479306B2Jan 20, 2009

SiCOH dielectric material with improved toughness and improved Si-C bonding, semiconductor device containing the same, and method to make the same

IBM26 citations92
US6265021B1Jul 24, 2001

Nanoparticle structures utilizing synthetic DNA lattices

IBM30 citations92
US7312524B2Dec 25, 2007

Method for fabricating an ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made

IBM23 citations91
US7135398B2Nov 14, 2006

Reliable low-k interconnect structure with hybrid dielectric

IBM18 citations91
US6939797B2Sep 6, 2005

Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereof

IBM26 citations91
US6737747B2May 18, 2004

Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereof

IBM43 citations91
US6734096B2May 11, 2004

Fine-pitch device lithography using a sacrificial hardmask

IBM22 citations91
US9786550B2Oct 10, 2017

Low resistance metal contacts to interconnects

IBM8 citations84
US8658488B2Feb 25, 2014

Method for forming semiconductor chip with graphene based devices in an interconnect structure of the chip

IBM6 citations84
US7915180B2Mar 29, 2011

SiCOH film preparation using precursors with built-in porogen functionality

IBM8 citations84
US7892648B2Feb 22, 2011

SiCOH dielectric material with improved toughness and improved Si-C bonding

IBM8 citations84
US7674521B2Mar 9, 2010

Materials containing voids with void size controlled on the nanometer scale

IBM9 citations84
US7521377B2Apr 21, 2009

SiCOH film preparation using precursors with built-in porogen functionality

IBM11 citations84
US7335980B2Feb 26, 2008

Hardmask for reliability of silicon based dielectrics

IBM12 citations84
US9711455B2Jul 18, 2017

Method of forming an air gap semiconductor structure with selective cap bilayer

IBM5 citations83
US7948051B2May 24, 2011

Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same

IBM4 citations74
US7517790B2Apr 14, 2009

Method and structure to enhance temperature/humidity/bias performance of semiconductor devices by surface modification

IBM7 citations74
US6929982B2Aug 16, 2005

Patterning layers comprised of spin-on ceramic films

IBM7 citations74
US6897650B2May 24, 2005

Magnetic-field sensor device

IBM10 citations74
US6673401B2Jan 6, 2004

Nanoparticle structures utilizing synthetic DNA lattices

IBM7 citations74
US9984940B1May 29, 2018

Selective and conformal passivation layer for 3D high-mobility channel devices

IBM6 citations73
US9799552B2Oct 24, 2017

Low resistance metal contacts to interconnects

IBM2 citations73
US9472710B1Oct 18, 2016

Low-loss large-grain optical waveguide for interconnecting components integrated on a glass substrate

IBM5 citations73

EDELSTEIN DANIEL C

3 patents

(unassigned)

2 patents

GATES STEPHEN M

2 patents

SONSUB INC

1 patent

DIMITRAKOPOULOS CHRISTOS D

1 patent

KURSUN EREN

1 patent

Showing the top 50 of 87 patents by PatentIndex Score.