Inventor
USUI YOUICHI
JP7 patents
Patents
7 patentsUS10001699B2Jun 19, 2018
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method
HOYA CORP6 citations83
US9897909B2Feb 20, 2018
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method
HOYA CORP2 citations72
US9494851B2Nov 15, 2016
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method
HOYA CORP2 citations61
US9348217B2May 24, 2016
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method
HOYA CORP2 citations61
US10620527B2Apr 14, 2020
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method
HOYA CORP0 citations51
US10429728B2Oct 1, 2019
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method
HOYA CORP0 citations51
US10295900B2May 21, 2019
Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method
HOYA CORP0 citations51