Inventor
SHIBUYA MASATO
JP28 patents
⚠️ This page may combine multiple inventors who share the name “SHIBUYA MASATO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
14 patentsUS6563567B1May 13, 2003
Method and apparatus for illuminating a surface using a projection imaging apparatus
NIKON CORP143 citations97
US6741394B1May 25, 2004
Optical integrator, illumination optical apparatus, exposure apparatus and observation apparatus
NIKON CORP63 citations96
US6238063B1May 29, 2001
Illumination optical apparatus and projection exposure apparatus
NIKON CORP89 citations96
US5739898AApr 14, 1998
Exposure method and apparatus
NIKON CORP150 citations96
US4943733AJul 24, 1990
Projection optical apparatus capable of measurement and compensation of distortion affecting reticle/wafer alignment
NIKON CORP71 citations96
US4864123ASep 5, 1989
Apparatus for detecting the level of an object surface
NIKON CORP61 citations96
US5563706AOct 8, 1996
Interferometric surface profiler with an alignment optical member
NIKON CORP65 citations94
US5851707ADec 22, 1998
Microlithography projection-exposure masks, and methods and apparatus employing same
NIKON CORP22 citations92
US5847812ADec 8, 1998
Projection exposure system and method
NIKON CORP33 citations92
US5535054AJul 9, 1996
Illumination optical system
NIKON CORP29 citations92
US5086222AFeb 4, 1992
Scanning type microscope with phase member
NIKON CORP25 citations92
US5891806AApr 6, 1999
Proximity-type microlithography apparatus and method
NIKON CORP40 citations91
US6291145B1Sep 18, 2001
Image formation method with photosensitive material
NIKON CORP29 citations90
US5902716AMay 11, 1999
Exposure method and apparatus
NIKON CORP16 citations74
FUJITSU LTD
3 patentsUS7414815B2Aug 19, 2008
Magnetic head actuator with centered deviation
FUJITSU LTD12 citations83
US7457084B2Nov 25, 2008
Recording medium drive with magnetic body embedded in housing base opposite voice coil motor to suppress leakage flux
FUJITSU LTD3 citations62
US7336448B2Feb 26, 2008
Magnetic head actuator with equalized deviation
FUJITSU LTD0 citations51