Inventor
FAIRBAIRN KEVIN P
US15 patents
⚠️ This page may combine multiple inventors who share the name “FAIRBAIRN KEVIN P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEVAC INC
9 patentsUS7005637B2Feb 28, 2006
Backside thinning of image array devices
INTEVAC INC64 citations95
US6919001B2Jul 19, 2005
Disk coating system
INTEVAC INC74 citations95
US8349196B2Jan 8, 2013
System and method for commercial fabrication of patterned media
INTEVAC INC17 citations92
US7901539B2Mar 8, 2011
Apparatus and methods for transporting and processing substrates
INTEVAC INC28 citations92
US7042060B2May 9, 2006
Backside thinning of image array devices
INTEVAC INC19 citations90
US9914994B2Mar 13, 2018
System architecture for combined static and pass-by processing
INTEVAC INC14 citations81
US7479686B2Jan 20, 2009
Backside imaging through a doped layer
INTEVAC INC5 citations60
US8998553B2Apr 7, 2015
High throughput load lock for solar wafers
INTEVAC INC2 citations57
US10752987B2Aug 25, 2020
System architecture for combined static and pass-by processing
INTEVAC INC0 citations49
BLUCK TERRY
4 patentsUS8293066B2Oct 23, 2012
Apparatus and methods for transporting and processing substrates
BLUCK TERRY23 citations91
US8303764B2Nov 6, 2012
Apparatus and methods for transporting and processing substrates
BLUCK TERRY13 citations83
US9524896B2Dec 20, 2016
Apparatus and methods for transporting and processing substrates
BLUCK TERRY4 citations72
US8087380B2Jan 3, 2012
Evaporative system for solar cell fabrication
BLUCK TERRY0 citations51