Inventor
LANE CHRISTOPHER T
US9 patents
⚠️ This page may combine multiple inventors who share the name “LANE CHRISTOPHER T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS7159599B2Jan 9, 2007
Method and apparatus for processing a wafer
APPLIED MATERIALS INC96 citations97
US6418874B1Jul 16, 2002
Toroidal plasma source for plasma processing
APPLIED MATERIALS INC272 citations97
US7585686B2Sep 8, 2009
Method and apparatus for processing a wafer
APPLIED MATERIALS INC33 citations92
US6712020B2Mar 30, 2004
Toroidal plasma source for plasma processing
APPLIED MATERIALS INC15 citations82
US9022715B2May 5, 2015
Load lock chamber designs for high-throughput processing system
APPLIED MATERIALS INC2 citations58
BLUCK TERRY
3 patentsUS8293066B2Oct 23, 2012
Apparatus and methods for transporting and processing substrates
BLUCK TERRY23 citations91
US8303764B2Nov 6, 2012
Apparatus and methods for transporting and processing substrates
BLUCK TERRY13 citations83
US9524896B2Dec 20, 2016
Apparatus and methods for transporting and processing substrates
BLUCK TERRY4 citations72