Inventor
SHOTOKUJI TAKUMI
JP8 patents
Patents
8 patentsUS10910511B2Feb 2, 2021
Manufacturing method of III-V compound crystal and manufacturing method of semiconductor device
DISCO CORP2 citations71
US9761492B2Sep 12, 2017
Processing method of optical device wafer
DISCO CORP3 citations71
US10109527B2Oct 23, 2018
Optical device wafer processing method
DISCO CORP3 citations70
US10157793B2Dec 18, 2018
Method of processing single-crystal substrate
DISCO CORP0 citations40
US10103061B2Oct 16, 2018
Processing method of single-crystal substrate
DISCO CORP0 citations40
US9735040B2Aug 15, 2017
Method of processing single-crystal substrate
DISCO CORP0 citations40
US9887140B2Feb 6, 2018
Wafer processing method
DISCO CORP0 citations39
US10096517B2Oct 9, 2018
Wafer processing method
DISCO CORP0 citations35