P

Inventor

TANAKA JUNICHI

JP261 patents
⚠️ This page may combine multiple inventors who share the name “TANAKA JUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

14 patents
US6197151B1Mar 6, 2001

Plasma processing apparatus and plasma processing method

HITACHI LTD223 citations99
US6129806AOct 10, 2000

Plasma processing apparatus and plasma processing method

HITACHI LTD92 citations98
US6590179B2Jul 8, 2003

Plasma processing apparatus and method

HITACHI LTD66 citations96
US6616759B2Sep 9, 2003

Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor

HITACHI LTD58 citations95
US7376479B2May 20, 2008

Process monitoring device for sample processing apparatus and control method of sample processing apparatus

HITACHI LTD15 citations93
US7158848B2Jan 2, 2007

Process monitoring device for sample processing apparatus and control method of sample processing apparatus

HITACHI LTD19 citations93
US7058467B2Jun 6, 2006

Process monitoring device for sample processing apparatus and control method of sample processing apparatus

HITACHI LTD16 citations93
US7058470B2Jun 6, 2006

Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor

HITACHI LTD11 citations93
US6879867B2Apr 12, 2005

Process monitoring device for sample processing apparatus and control method of sample processing apparatus

HITACHI LTD25 citations93
US6745096B2Jun 1, 2004

Maintenance method and system for plasma processing apparatus etching and apparatus

HITACHI LTD18 citations93
US6706543B2Mar 16, 2004

Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a therefor

HITACHI LTD13 citations93
US6902683B1Jun 7, 2005

Plasma processing apparatus and plasma processing method

HITACHI LTD29 citations92
US6733618B2May 11, 2004

Disturbance-free, recipe-controlled plasma processing system and method

HITACHI LTD18 citations92
US6716301B2Apr 6, 2004

Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe

HITACHI LTD25 citations92

SONY CORP

10 patents

NEC CORP

4 patents

PIONEER CORP

4 patents

VELOS MEDIA LLC

4 patents

DAIHEN CORP

2 patents

KOMATSU MFG CO LTD

2 patents

HITACHI HIGH TECH CORP

2 patents

SHARP KK

2 patents

TOYOTA MOTOR CO LTD

1 patent

PIONEER KABUSHIKI KAISHA

1 patent

TANAKA JUNICHI

1 patent

TACHIKARA CO LTD

1 patent

FUJIFILM CORP

1 patent

MAZDA MOTOR

1 patent

Showing the top 50 of 261 patents by PatentIndex Score.