Inventor
SON WOO-MOK
KR2 patents
Patents
2 patentsUS11222786B2Jan 11, 2022
Method of manufacture including polishing pad monitoring method and polishing apparatus including polishing pad monitoring device
SAMSUNG ELECTRONICS CO LTD3 citations69
US11735427B2Aug 22, 2023
Polishing apparatus including polishing pad conditioner, non-contact displacement sensor, and data processor
SAMSUNG ELECTRONICS CO LTD0 citations59