Inventor
JANG YOUNG-SEOK
KR7 patents
⚠️ This page may combine multiple inventors who share the name “JANG YOUNG-SEOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS11222786B2Jan 11, 2022
Method of manufacture including polishing pad monitoring method and polishing apparatus including polishing pad monitoring device
SAMSUNG ELECTRONICS CO LTD3 citations69
US11735427B2Aug 22, 2023
Polishing apparatus including polishing pad conditioner, non-contact displacement sensor, and data processor
SAMSUNG ELECTRONICS CO LTD0 citations59
US11648644B2May 16, 2023
Polishing pad conditioning apparatus
SAMSUNG ELECTRONICS CO LTD0 citations55