Inventor
GOTTHEIM SAMUEL E
US16 patents
Patents
16 patentsUS10745282B2Aug 18, 2020
Diamond-like carbon film
APPLIED MATERIALS INC4 citations84
US11842897B2Dec 12, 2023
High density carbon films for patterning applications
APPLIED MATERIALS INC2 citations73
US11043372B2Jun 22, 2021
High-density low temperature carbon films for hardmask and other patterning applications
APPLIED MATERIALS INC4 citations73
US10910381B2Feb 2, 2021
Multicolor approach to DRAM STI active cut patterning
APPLIED MATERIALS INC1 citations73
US11557466B2Jan 17, 2023
Tuneable uniformity control utilizing rotational magnetic housing
APPLIED MATERIALS INC2 citations71
US12463036B2Nov 4, 2025
High density carbon films for patterning applications
APPLIED MATERIALS INC0 citations62
US11676858B2Jun 13, 2023
High bias deposition of high quality gapfill
APPLIED MATERIALS INC1 citations62
US11638374B2Apr 25, 2023
Multicolor approach to DRAM STI active cut patterning
APPLIED MATERIALS INC0 citations62
US11430655B2Aug 30, 2022
Low temperature high-quality dielectric films
APPLIED MATERIALS INC0 citations62
US11335690B2May 17, 2022
Multicolor approach to DRAM STI active cut patterning
APPLIED MATERIALS INC0 citations62
US11332376B2May 17, 2022
Diamond-like carbon film
APPLIED MATERIALS INC0 citations62
US11062939B2Jul 13, 2021
High bias deposition of high quality gapfill
APPLIED MATERIALS INC1 citations62
US10840088B2Nov 17, 2020
Low temperature high-quality dielectric films
APPLIED MATERIALS INC1 citations62
US12555741B2Feb 17, 2026
Magnetic housing systems
APPLIED MATERIALS INC0 citations61
US11587764B2Feb 21, 2023
Magnetic housing systems
APPLIED MATERIALS INC1 citations61
US11270905B2Mar 8, 2022
Modulating film properties by optimizing plasma coupling materials
APPLIED MATERIALS INC0 citations61