Inventor
CHUANG SHENG-HSIANG
TW20 patents
Patents
20 patentsUS10569520B2Feb 25, 2020
Wafer debonding system and method
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US10155369B2Dec 18, 2018
Wafer debonding system and method
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US10490463B2Nov 26, 2019
Automated inspection tool
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations81
US10714364B2Jul 14, 2020
Apparatus and method for inspecting wafer carriers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11961770B2Apr 16, 2024
Automated inspection tool
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11430108B2Aug 30, 2022
Defect offset correction
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10889097B2Jan 12, 2021
Wafer debonding system and method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10852704B2Dec 1, 2020
Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12334373B2Jun 17, 2025
Apparatus and method for inspecting wafer carriers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11929271B2Mar 12, 2024
Apparatus and method for inspecting wafer carriers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11842481B2Dec 12, 2023
Defect offset correction
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11754989B2Sep 12, 2023
Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10872794B2Dec 22, 2020
Automatic in-line inspection system
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11651981B2May 16, 2023
Method and system for map-free inspection of semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11171065B2Nov 9, 2021
Automated inspection tool
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US11120539B2Sep 14, 2021
Topological scanning method and system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10876976B2Dec 29, 2020
Apparatus and method for substrate inspection
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US11152238B2Oct 19, 2021
Semiconductor processing stage profiler jig
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10839507B2Nov 17, 2020
Defect offset correction
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10018573B2Jul 10, 2018
Dual-function wafer handling apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45