Inventor

OTOMO SHOHEI

JP2 patents

Patents

2 patents

US12522913B2Jan 13, 2026

Sputtering target

FURUYA METAL CO LTD0 citations46

US12340995B2Jun 24, 2025

Ruthenium-based sputtering target and method for manufacturing same

FURUYA METAL CO LTD0 citations43