Inventor
CATEY ERIC BRIAN
US10 patents
⚠️ This page may combine multiple inventors who share the name “CATEY ERIC BRIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SMIRNOV STANISLAV Y
3 patentsUS9285687B2Mar 15, 2016
Inspection apparatus, lithographic apparatus, and device manufacturing method
SMIRNOV STANISLAV Y2 citations60
US8259398B2Sep 4, 2012
High numerical aperture catadioptric objectives without obscuration and applications thereof
SMIRNOV STANISLAV Y0 citations48
US8064148B2Nov 22, 2011
High numerical aperture catadioptric objectives without obscuration and applications thereof
SMIRNOV STANISLAV Y1 citations48
ASML HOLDING NV
3 patentsUS10895813B2Jan 19, 2021
Lithographic cluster, lithographic apparatus, and device manufacturing method
ASML HOLDING NV0 citations52
US10481507B2Nov 19, 2019
Measurement method comprising in-situ printing of apparatus mark and corresponding apparatus
ASML HOLDING NV0 citations50
US10928738B2Feb 23, 2021
Adaptive filter for in-line correction
ASML HOLDING NV0 citations40