Inventor
SHMAREV YEVGENIY KONSTANTINOVICH
US19 patents
⚠️ This page may combine multiple inventors who share the name “SHMAREV YEVGENIY KONSTANTINOVICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
9 patentsUS12140872B2Nov 12, 2024
Optical designs of miniaturized overlay measurement system
ASML HOLDING NV0 citations61
US10724961B2Jul 28, 2020
Method and device for focusing in an inspection system
ASML HOLDING NV1 citations61
US8982481B2Mar 17, 2015
Catadioptric objective for scatterometry
ASML HOLDING NV2 citations60
US11126007B2Sep 21, 2021
Beam splitting prism systems
ASML HOLDING NV0 citations57
US7630136B2Dec 8, 2009
Optical integrators for lithography systems and methods
ASML HOLDING NV3 citations56
US10048591B2Aug 14, 2018
Catadioptric illumination system for metrology
ASML HOLDING NV0 citations51
US9904173B2Feb 27, 2018
Method and apparatuses for optical pupil symmetrization
ASML HOLDING NV1 citations51
US10747010B2Aug 18, 2020
Beam splitting prism systems
ASML HOLDING NV0 citations47
US10754259B2Aug 25, 2020
Method and device for pupil illumination in overlay and critical dimension sensors
ASML HOLDING NV0 citations40
SHMAREV YEVGENIY KONSTANTINOVICH
3 patentsUS8189203B2May 29, 2012
Reticle inspection systems and method
SHMAREV YEVGENIY KONSTANTINOVICH7 citations76
US10866526B2Dec 15, 2020
Metrology method and device
SHMAREV YEVGENIY KONSTANTINOVICH0 citations49
US8934084B2Jan 13, 2015
System and method for printing interference patterns having a pitch in a lithography system
SHMAREV YEVGENIY KONSTANTINOVICH1 citations49