Inventor
LEE CHANG-OU
US8 patents
Patents
8 patentsUS5294571AMar 15, 1994
Rapid thermal oxidation of silicon in an ozone ambient
VLSI TECHNOLOGY INC60 citations94
US5434104AJul 18, 1995
Method of using corrosion prohibiters in aluminum alloy films
VLSI TECHNOLOGY INC26 citations91
US5336366AAug 9, 1994
New dry etch technique
VLSI TECHNOLOGY INC26 citations91
US5286518AFeb 15, 1994
Integrated-circuit processing with progressive intermetal-dielectric deposition
VLSI TECHNOLOGY INC30 citations91
US5745990AMay 5, 1998
Titanium boride and titanium silicide contact barrier formation for integrated circuits
VLSI TECHNOLOGY INC48 citations90
US5610105AMar 11, 1997
Densification in an intermetal dielectric film
VLSI TECHNOLOGY INC49 citations89
US5329161AJul 12, 1994
Molybdenum boride barrier layers between aluminum and silicon at contact points in semiconductor devices
VLSI TECHNOLOGY INC9 citations72
US5493132AFeb 20, 1996
Integrated circuit contact barrier formation with ion implant
VLSI TECHNOLOGY INC10 citations71