Inventor
KOENIGSEDER SIGMUND
US4 patents
Patents
4 patentsUS5434104AJul 18, 1995
Method of using corrosion prohibiters in aluminum alloy films
VLSI TECHNOLOGY INC26 citations91
US5286518AFeb 15, 1994
Integrated-circuit processing with progressive intermetal-dielectric deposition
VLSI TECHNOLOGY INC30 citations91
US5745990AMay 5, 1998
Titanium boride and titanium silicide contact barrier formation for integrated circuits
VLSI TECHNOLOGY INC48 citations90
US5329161AJul 12, 1994
Molybdenum boride barrier layers between aluminum and silicon at contact points in semiconductor devices
VLSI TECHNOLOGY INC9 citations72