Inventor

MCINTYRE EDWARD K

US7 patents

⚠️ This page may combine multiple inventors who share the name “MCINTYRE EDWARD K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

4 patents

US6207964B1Mar 27, 2001

Method to provide consistent electrostatic clamping through real time control of electrostatic charge deposition in an electrostatic chuck

AXCELIS TECH INC0 citations37

(unassigned)

1 patent

US6608315B1Aug 19, 2003

Mechanism for prevention of neutron radiation in ion implanter beamline

21 citations90

EATON CORP

1 patent

US6137112AOct 24, 2000

Time of flight energy measurement apparatus for an ion beam implanter

EATON CORP44 citations90

SEMEQUIP INC

1 patent

US7875125B2Jan 25, 2011

Method for extending equipment uptime in ion implantation

SEMEQUIP INC2 citations58

MCINTYRE EDWARD K

AXCELIS TECH INC

Continuously variable aperture for high-energy ion implanter

Charge integration based electrostatic clamp health monitor

System and method for electrostatic clamping of workpieces

Method to provide consistent electrostatic clamping through real time control of electrostatic charge deposition in an electrostatic chuck

(unassigned)

Mechanism for prevention of neutron radiation in ion implanter beamline

EATON CORP

Time of flight energy measurement apparatus for an ion beam implanter

SEMEQUIP INC

Method for extending equipment uptime in ion implantation